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雑誌Japanese journal of applied physics : JJAP
Volume number52(6)(2):2013.6
ArticlePhase Imag...

Phase Imaging of Extreme-Ultraviolet Mask Using Coherent Extreme-Ultraviolet Scatterometry Microscope (Special Issue : Microprocesses and Nanotechnology)

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Phase Imaging of Extreme-Ultraviolet Mask Using Coherent Extreme-Ultraviolet Scatterometry Microscope

(Special Issue : Microprocesses and Nanotechnology)

Call No. (NDL)
Z53-A375
Bibliographic ID of National Diet Library
024643639
Material type
記事
Author
Tetsuo Haradaほか
Publisher
Tokyo : The Japan Society of Applied Physics
Publication date
2013-06
Material Format
Paper
Journal name
Japanese journal of applied physics : JJAP 52(6)(2):2013.6
Publication Page
p.06GB02-1-5
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Paper

Material Type
記事
Title
Phase Imaging of Extreme-Ultraviolet Mask Using Coherent Extreme-Ultraviolet Scatterometry Microscope
Author/Editor
Tetsuo Harada
Masato Nakasuji
Yutaka Nagata 他
Series Title
Special Issue : Microprocesses and Nanotechnology
Author Heading
Tetsuo Harada
Masato Nakasuji
Yutaka Nagata
Periodical title
Japanese journal of applied physics : JJAP
No. or year of volume/issue
52(6)(2):2013.6
Volume
52
Issue
6
Sequential issue number
2