ナノインプリント技術の最新動向と展望 (特集ナノインプリントリソグラフィ技術における微細化と低コスト化の現状)

ナノインプリント技術の最新動向と展望

(特集ナノインプリントリソグラフィ技術における微細化と低コスト化の現状)

Journal name: Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 57(5)=369:2013.5

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Material Type: 記事
Title: ナノインプリント技術の最新動向と展望
Author/Editor: 水野潤
岡田愛姫子
笠原崇史
Series Title: 特集ナノインプリントリソグラフィ技術における微細化と低コスト化の現状
Author Heading: 水野潤
岡田愛姫子
笠原崇史
Alternative Title: Latest trends and challenges in nanoimprinting technology
Periodical title: Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
No. or year of volume/issue: 57(5)=369:2013.5
Volume: 57
Issue: 5
Sequential issue number: 369
Pages: 279-282
Publication date of volume/issue (W3CDTF): 2013-05
ISSN (Periodical Title): 0914-2703
ISSN-L (Periodical Title): 0914-2703
Publication (Periodical Title): 東京 : 砥粒加工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: nanoimprint
roll to roll
UV resin
mold
single nanopatterning
NDLC: ZN11
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1147
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024651136
http://id.ndl.go.jp/bib/024651136
Bibliographic Record Category (NDL): 632