高規則性陽極酸化ポーラスアルミナを用いたナノインプリント (特集ナノインプリントリソグラフィ技術における微細化と低コスト化の現状)

高規則性陽極酸化ポーラスアルミナを用いたナノインプリント

(特集ナノインプリントリソグラフィ技術における微細化と低コスト化の現状)

Journal name: Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 57(5)=369:2013.5

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Material Type: 記事
Title: 高規則性陽極酸化ポーラスアルミナを用いたナノインプリント
Author/Editor: 柳下崇
益田秀樹
Series Title: 特集ナノインプリントリソグラフィ技術における微細化と低コスト化の現状
Author Heading: 柳下崇
益田秀樹
Alternative Title: Nanoimprinting using ordered anodic porous alumina
Periodical title: Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
No. or year of volume/issue: 57(5)=369:2013.5
Volume: 57
Issue: 5
Sequential issue number: 369
Pages: 283-286
Publication date of volume/issue (W3CDTF): 2013-05
ISSN (Periodical Title): 0914-2703
ISSN-L (Periodical Title): 0914-2703
Publication (Periodical Title): 東京 : 砥粒加工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: anodic porous alumina
nanoimprinting
antireflection structure
NDLC: ZN11
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1147
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024651158
http://id.ndl.go.jp/bib/024651158
Bibliographic Record Category (NDL): 632