ナノインプリント・パターンのマクロ検査技術 (特集ナノインプリントリソグラフィ技術における微細化と低コスト化の現状)

ナノインプリント・パターンのマクロ検査技術

(特集ナノインプリントリソグラフィ技術における微細化と低コスト化の現状)

Journal name: Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 57(5)=369:2013.5

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Material Type: 記事
Title: ナノインプリント・パターンのマクロ検査技術
Author/Editor: 小瀧健一
Series Title: 特集ナノインプリントリソグラフィ技術における微細化と低コスト化の現状
Author Heading: 小瀧健一
Alternative Title: Macro Inspection technologies of nanoimprint pattern
Periodical title: Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
No. or year of volume/issue: 57(5)=369:2013.5
Volume: 57
Issue: 5
Sequential issue number: 369
Pages: 295-298
Publication date of volume/issue (W3CDTF): 2013-05
ISSN (Periodical Title): 0914-2703
ISSN-L (Periodical Title): 0914-2703
Publication (Periodical Title): 東京 : 砥粒加工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: nano-imprint lithography
macro inspection
micro inspection
yield management
NDLC: ZN11
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1147
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024651225
http://id.ndl.go.jp/bib/024651225
Bibliographic Record Category (NDL): 632