AlN/Al/AlNナノ積層膜の作製と光学的特性

Journal name: 表面技術 = Journal of the Surface Finishing Society of Japan 64(5):2013.5

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Material Type: 記事
Title: AlN/Al/AlNナノ積層膜の作製と光学的特性
Author/Editor: 小川倉一
近藤匡俊
清水正美他
Author Heading: 小川倉一
近藤匡俊
清水正美
Alternative Title: Optical Properties of the Sputter-Deposited AlN/Al/AlN Multilayer Nanofilms
Periodical title: 表面技術 = Journal of the Surface Finishing Society of Japan
No. or year of volume/issue: 64(5):2013.5
Volume: 64
Issue: 5
Pages: 311-314
Publication date of volume/issue (W3CDTF): 2013-05
ISSN (Periodical Title): 0915-1869
ISSN-L (Periodical Title): 0915-1869
Publication (Periodical Title): 東京 : 表面技術協会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: Transparent Heat Insulation Films
Multilayer Films
AlN/Al/AlN
Sputtering System
N-MHV Sputtering
NDLC: ZP41
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-291
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024655854
http://id.ndl.go.jp/bib/024655854
Bibliographic Record Category (NDL): 632