Spin-on Glass as Perpendicular Orientation Control Layer for Block Copolymer

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Spin-on Glass as Perpendicular Orientation Control Layer for Block Copolymer

Call No. (NDL)
Z53-W515
Bibliographic ID of National Diet Library
024660180
Material type
記事
Author
Hiroko Nakamuraほか
Publisher
Chiba : The Society of Photopolymer Science and Technology
Publication date
2013
Material Format
Paper
Journal name
Journal of photopolymer science and technology 26(1):2013
Publication Page
p.49-54
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Paper Digital

Material Type
記事
Author/Editor
Hiroko Nakamura
Satoshi Mikoshiba
Atsushi Hieno 他
Periodical title
Journal of photopolymer science and technology
No. or year of volume/issue
26(1):2013
Volume
26
Issue
1
Pages
49-54
Publication date of volume/issue (W3CDTF)
2013