Fabrication of Low Dislocation Density GaN Template by Nano-channel FIELO Using Nanoimprint Lithography

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Fabrication of Low Dislocation Density GaN Template by Nano-channel FIELO Using Nanoimprint Lithography

Call No. (NDL)
Z53-W515
Bibliographic ID of National Diet Library
024660289
Material type
記事
Author
Akiko Okadaほか
Publisher
Chiba : The Society of Photopolymer Science and Technology
Publication date
2013
Material Format
Paper
Journal name
Journal of photopolymer science and technology 26(1):2013
Publication Page
p.69-72
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Paper Digital

Material Type
記事
Author/Editor
Akiko Okada
Shuichi Shoji
Hidetoshi Shinohara 他
Periodical title
Journal of photopolymer science and technology
No. or year of volume/issue
26(1):2013
Volume
26
Issue
1
Pages
69-72
Publication date of volume/issue (W3CDTF)
2013