Innovative and Tailor-made Resist and Working Stamp Materials for Advancing NIL-based Production Technology
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- Arne SchleunitzMarko VoglerIrene Fernandez-Cuesta 他
- Author Heading
- Periodical title
- Journal of photopolymer science and technology
- No. or year of volume/issue
- 26(1):2013
- Volume
- 26
- Issue
- 1
- Pages
- 119-124
- Publication date of volume/issue (W3CDTF)
- 2013