圧電素子による精密位置決めステージの制振に関する研究
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- Material Type
- 記事
- Author/Editor
- 田中 慶一
- Author Heading
- Alternative Title
- Study of Vibration Suppression on Positioning Stage by using Piezoelectric Device
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 79(5)=941:2013.5
- Volume
- 79
- Issue
- 5
- Sequential issue number
- 941