ナノチャネルを有する強誘電体ゲート薄膜トランジスタの作製とその電気特性評価(小特集第53回真空に関する連合講演会論文集(2))

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Material Type: 記事
Title: ナノチャネルを有する強誘電体ゲート薄膜トランジスタの作製とその電気特性評価
Author/Editor: 野村侑平
吉村武
藤村紀文
Series Title: 小特集第53回真空に関する連合講演会論文集(2)
Author Heading: 野村侑平
吉村武
藤村紀文
Alternative Title: Fabrication and Electric Properties of Ferroelectric-Gate Thin Film Transistors with Nano-Channel
Periodical title: Journal of the Vacuum Society of Japan = 真空
No. or year of volume/issue: 56(5):2013.5
Volume: 56
Issue: 5
Pages: 172-175
Publication date of volume/issue (W3CDTF): 2013-05
ISSN (Periodical Title): 1882-2398
ISSN-L (Periodical Title): 1882-2398
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024669543
http://id.ndl.go.jp/bib/024669543
Bibliographic Record Category (NDL): 632