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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 橋本 雄一増田 康宏
- Alternative Title
- Evaluation of Gold Film Deposited using Neutral Argon Beam
- Periodical title
- Journal of the Vacuum Society of Japan = 真空
- No. or year of volume/issue
- 56(5):2013.5
- Volume
- 56
- Issue
- 5
- Pages
- 182-186