キャピラリー放電を用いたDiamond-Like Carbon薄膜の成膜技術の開発
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- Material Type
- 記事
- Author/Editor
- 藤井 清利藤原 閲夫清水 政義 他
- Alternative Title
- Application of Capillary Discharge Technique for Deposition of Diamond-Like Carbon Thin Films
- Periodical title
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
- No. or year of volume/issue
- 133(5):2013.5
- Volume
- 133
- Issue
- 5
- Pages
- 286-292