MEMS構造に損傷を与えないパーティクル除去方法
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- Material Type
- 記事
- Author/Editor
- 平野 栄樹Mahmoud RaslyNeelam Kaushik 他
- Author Heading
- Alternative Title
- Particle Removal without Causing Damage to MEMS Structure
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 133(5):2013.5
- Volume
- 133
- Issue
- 5
- Pages
- 157-163