開放系でのプラズマプロセス実現に向けた雰囲気制御技術開発
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 内藤 皓貴紺野 伸顕徳永 隆志 他
- Alternative Title
- Development of the Local Ambient Gas Control Technology and its Application to Atmospheric Pressure Plasma Processes
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 133(5):2013.5
- Volume
- 133
- Issue
- 5
- Pages
- 164-169