Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 北 智洋田主 裕一朗奈良 匡樹 他
- Series Title
- Alternative Title
- Silicon photonics devices on 300 mm wafer fabricated by using ArF immersion lithography
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 113(100):2013.6.21
- Volume
- 113
- Issue
- 100