感光性スピンコート膜...

感光性スピンコート膜を用いたパターン形成とデバイス応用 (有機エレクトロニクス)

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感光性スピンコート膜を用いたパターン形成とデバイス応用

(有機エレクトロニクス)

Call No. (NDL)
Z16-940
Bibliographic ID of National Diet Library
024678819
Material type
記事
Author
加藤 大智ほか
Publisher
東京 : 電子情報通信学会
Publication date
2013-06-21
Material Format
Paper
Journal name
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 113(98):2013.6.21
Publication Page
p.13-17
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Paper

Material Type
記事
Author/Editor
加藤 大智
田中 邦明
臼井 博明
Alternative Title
Pattern Formation Using Photoreactive Spin-Coated Film and its Application to Device Fabrication
Periodical title
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue
113(98):2013.6.21
Volume
113
Issue
98