パルス電解条件が銅めっき皮膜の結晶配向性とエッチングレートに与える影響
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- Material Type
- 記事
- Author/Editor
- 久保田 賢治松本 克才吉原 佐知雄
- Alternative Title
- Effect of Pulse Parameters on the Crystal Orientation and Etching Rate of Copper Films
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 64(6):2013.6
- Volume
- 64
- Issue
- 6
- Pages
- 368-370