Pursuit of Lower Critical Dimensional Uniformity in EUV Resists

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Material Type: 記事
Title: Pursuit of Lower Critical Dimensional Uniformity in EUV Resists
Author/Editor: James Thackeray
James Cameron
Vipul Jain 他
Author Heading: James Thackeray
James Cameron
Vipul Jain
Periodical title: Journal of photopolymer science and technology
No. or year of volume/issue: 26(5):2013
Volume: 26
Issue: 5
Pages: 605-610
Publication date of volume/issue (W3CDTF): 2013
ISSN (Periodical Title): 0914-9244
ISSN-L (Periodical Title): 0914-9244
Publication (Periodical Title): Chiba : The Society of Photopolymer Science and Technology
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: Photoresist
chemical amplification
polymer-bound PAG
acid diffusion
photo-decomposable base
NDLC: ZP48
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z53-W515
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024709748
http://id.ndl.go.jp/bib/024709748
Bibliographic Record Category (NDL): 632