金属・合金/誘電体ナノ積層化による低抵抗透明導電フィルム (小特集 最近のスパッタリング動向)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 小川 倉一
- Series Title
- Author Heading
- Alternative Title
- Low Resistivity Transparent Conductive Film of the Metal Alloy/Dielectric Nano-Multilayer by Sputtering
- Periodical title
- 表面技術 = Journal of the Surface Finishing Society of Japan
- No. or year of volume/issue
- 64(7):2013.7
- Volume
- 64
- Issue
- 7