薄膜形状記憶合金のハイスループット評価法 (特集 センサ・マイクロマシン用材料とその創成・評価技術)
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- Material Type
- 記事
- Title
- Author/Editor
- 青野 祐子川口 龍太郎桜井 淳平 他
- Series Title
- Alternative Title
- High-Throughput Characterization of Thin Film Shape Memory Alloys
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 133(8):2013.8
- Volume
- 133
- Issue
- 8