感光性フィルムの特性と応用(特集リソグラフィと光架橋・硬化材料)

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Material Type: 記事
Title: 感光性フィルムの特性と応用
Author/Editor: 村上泰治
Series Title: 特集リソグラフィと光架橋・硬化材料
Author Heading: 村上泰治
Alternative Title: Properties and Applications of Photosensitive Films
Periodical title: ネットワークポリマー = Journal of network polymer, Japan
No. or year of volume/issue: 34(5):2013
Volume: 34
Issue: 5
Pages: 253-260
Publication date of volume/issue (W3CDTF): 2013
ISSN (Periodical Title): 1342-0577
ISSN-L (Periodical Title): 1342-0577
Publication (Periodical Title): 東京 : 合成樹脂工業協会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: Photosensitive film
Sensitivity
Resolution
Mechanical property
NDLC: ZP17
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-845
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024917551
http://id.ndl.go.jp/bib/024917551
Bibliographic Record Category (NDL): 632