Holdings of Libraries in Japan
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 神谷 庄司宍戸 信之小岩 康三 他
- Series Title
- Alternative Title
- A New Trend of Sub-Micron Scale Mechanical Engineering for the Structural Reliability of Micro/Nano Devices
- Periodical title
- 日本実験力学会講演論文集 : 年次講演会 = Proceedings of JSEM : annual Conference on Experimental Mechanics
- No. or year of volume/issue
- (13):2013
- Issue
- 13
- Pages
- 116-118