Siナノワイヤの機械...

Siナノワイヤの機械特性に及ぼすFIB加工ダメージと超高真空アニールの影響 (2013年度年次講演会)

Icons representing 記事

Siナノワイヤの機械特性に及ぼすFIB加工ダメージと超高真空アニールの影響

(2013年度年次講演会)

Call No. (NDL)
Z74-D130
Bibliographic ID of National Diet Library
024921397
Material type
記事
Author
藤井 達也ほか
Publisher
東京 : 日本実験力学会
Publication date
2013
Material Format
Paper
Journal name
日本実験力学会講演論文集 : 年次講演会 = Proceedings of JSEM : annual Conference on Experimental Mechanics (13):2013
Publication Page
p.132-135
View All

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

  • CiNii Research

    Search Service
    You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type
記事
Author/Editor
藤井 達也
生津 資大
須藤 孝一 他
Alternative Title
Effects of FIB-induced Damage and Ultra-high Vacuum Annealing on the Mechanical Properties of Silicon Nanowires
Periodical title
日本実験力学会講演論文集 : 年次講演会 = Proceedings of JSEM : annual Conference on Experimental Mechanics
No. or year of volume/issue
(13):2013
Issue
13
Pages
132-135