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X線ラミノグラフィーによる大面積平板試料の3次元構造解析

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X線ラミノグラフィーによる大面積平板試料の3次元構造解析

Call No. (NDL)
Z15-561
Bibliographic ID of National Diet Library
024923532
Material type
記事
Author
星野 真人ほか
Publisher
大阪 : 日本放射光学会
Publication date
2013-09
Material Format
Paper
Journal name
放射光 : 日本放射光学会誌 = Journal of the Japanese Society for Synchrotron Radiation Research / 日本放射光学会 編 26(5):2013.9
Publication Page
p.257-267
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Paper

Material Type
記事
Author/Editor
星野 真人
上杉 健太朗
竹内 晃久 他
Alternative Title
Three-dimensional structural analysis of laterally extended objects using X-ray laminography
Periodical title
放射光 : 日本放射光学会誌 = Journal of the Japanese Society for Synchrotron Radiation Research / 日本放射光学会 編
No. or year of volume/issue
26(5):2013.9
Volume
26
Issue
5
Pages
257-267