SiC単結晶エピタキシャルウェーハの高品質化 (ワイドバンドギャップ材料の基礎研究の充実と新たな応用)
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- Material Type
- 記事
- Author/Editor
- 大谷 昇
- Series Title
- Author Heading
- Alternative Title
- Toward the realization of high quality SiC epitaxial wafers
- Periodical title
- 応用物理
- No. or year of volume/issue
- 82(10):2013.10
- Volume
- 82
- Issue
- 10