アモルファス酸化物半導体薄膜の分析・評価技術 (ワイドバンドギャップ材料の基礎研究の充実と新たな応用)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 林 和志日野 綾岸 智弥 他
- Series Title
- Alternative Title
- Analysis and evaluation techniques of amorphous oxide semiconductor thin films
- Periodical title
- 応用物理
- No. or year of volume/issue
- 82(10):2013.10
- Volume
- 82
- Issue
- 10