超精密加工専門委員会 原子制御製造プロセスの創出に向けて (特集 専門委員会・分科会研究レビュー)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 安武 潔
- Series Title
- Author Heading
- Alternative Title
- Atomically Controlled Fabrication Process as the Next Generation Ultra-Precision Machining Technology
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 79(10)=946:2013.10
- Volume
- 79
- Issue
- 10