プラズマナノ加工における表面ラフネスとリップル形成機構 (特集 ナノ材料のプラズマプロセシング)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 斧 高一津田 博隆中崎 暢也 他
- Series Title
- Alternative Title
- Plasma Etch Challenges for Nanoscale ULSI Device Fabrication : Modeling and Simulation of Surface Roughening and Rippling during Plasma Etching of Si
- Periodical title
- 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編
- No. or year of volume/issue
- 34(10):2013.10
- Volume
- 34
- Issue
- 10