アフィリエイト通信精密工学会アフィリエイト解説博士論文変調照明シフトによる光学式超解像欠陥計測に関する研究

Journal name: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編 79(10)=946:2013.10

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Material Type: 記事
Title: アフィリエイト通信精密工学会アフィリエイト解説博士論文変調照明シフトによる光学式超解像欠陥計測に関する研究
Author/Editor: 臼杵深
Author Heading: 臼杵深
Periodical title: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編
No. or year of volume/issue: 79(10)=946:2013.10
Volume: 79
Issue: 10
Sequential issue number: 946
Pages: 924-926
Publication date of volume/issue (W3CDTF): 2013-10
ISSN (Periodical Title): 0912-0289
ISSN-L (Periodical Title): 0912-0289
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN12
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-466
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024936995
http://id.ndl.go.jp/bib/024936995
Bibliographic Record Category (NDL): 632