高温環境下におけるSiNx/SiCyナノ積層薄膜の自己き裂治癒挙動
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- Material Type
- 記事
- Author/Editor
- 中谷 正憲西村 淳樹花木 聡 他
- Alternative Title
- Self-Crack-Healing Behavior of SiNx/SiCy Nano-Laminated Thin Film under High Temperature Environment
- Periodical title
- 材料 / 日本材料学会 [編]
- No. or year of volume/issue
- 62(10):2013.10
- Volume
- 62
- Issue
- 10
- Pages
- 634-639