6.x nm領域における希土類プラズマ極端紫外光源 (特集 リソグラフィとその関連技術・応用技術)
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- Material Type
- 記事
- Author/Editor
- 大塚 崇光東口 武史湯上 登
- Series Title
- Alternative Title
- Rare-earth Plasma Beyond Extreme Ultraviolet (BEUV) Sources at 6.x nm
- Periodical title
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
- No. or year of volume/issue
- 133(10):2013.10
- Volume
- 133
- Issue
- 10