フレキシブル低誘電率...

フレキシブル低誘電率膜用の大面積多孔ポリイミド製造プロセスの開発 (特集 革新的製造技術の新展開)

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フレキシブル低誘電率膜用の大面積多孔ポリイミド製造プロセスの開発

(特集 革新的製造技術の新展開)

Call No. (NDL)
Z17-82
Bibliographic ID of National Diet Library
024956607
Material type
記事
Author
瀧 健太郎
Publisher
川崎 : 化学工業社
Publication date
2013-11
Material Format
Paper
Journal name
ケミカルエンジニヤリング = Chemical engineering 58(11)=706:2013.11
Publication Page
p.837-839
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Paper

Material Type
記事
Author/Editor
瀧 健太郎
Author Heading
Periodical title
ケミカルエンジニヤリング = Chemical engineering
No. or year of volume/issue
58(11)=706:2013.11
Volume
58
Issue
11
Sequential issue number
706