ミストCVD法によるAlOx薄膜作製に対するO₃支援の効果 (特集 半導体エレクトロニクス)
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- Material Type
- 記事
- Author/Editor
- 内田 貴之川原村 敏幸古田 守 他
- Series Title
- Alternative Title
- The Effect of O₃ Support for Fabrication of AlOx Thin Film by Mist CVD Technique
- Periodical title
- 材料 / 日本材料学会 [編]
- No. or year of volume/issue
- 62(11):2013.11
- Volume
- 62
- Issue
- 11