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外部磁場を印加した誘導結合プラズマ電子源の性能評価

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外部磁場を印加した誘導結合プラズマ電子源の性能評価

Call No. (NDL)
Z15-B41
Bibliographic ID of National Diet Library
025101668
Material type
記事
Author
青柳 潤一郎ほか
Publisher
[茨木] : プラズマ応用科学会
Publication date
2013-06
Material Format
Paper
Journal name
プラズマ応用科学 = Applied plasma science : journal of IAPS 21(1):2013.6
Publication Page
p.3-8
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Paper

Material Type
記事
Author/Editor
青柳 潤一郎
太田 知里
鳥井 夏実 他
Alternative Title
Evaluation of Inductively Coupled Plasma Cathode with External Magnetic Field
Periodical title
プラズマ応用科学 = Applied plasma science : journal of IAPS
No. or year of volume/issue
21(1):2013.6
Volume
21
Issue
1
Pages
3-8