SFJ-PVDによるナノ結晶Ge膜の開発

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Material Type: 記事
Title: SFJ-PVDによるナノ結晶Ge膜の開発
Author/Editor: 湯本敦史
鷹野一朗共同研究
丹羽直毅共同研究他
Author Heading: 湯本敦史
鷹野一朗
丹羽直毅
Periodical title: 特別教育・研究報告集
No. or year of volume/issue: 2012年度
Pages: 352-355
Publication date of volume/issue (W3CDTF): 2012
ISSN (Periodical Title): 2185-7326
ISSN-L (Periodical Title): 2185-7326
Publication (Periodical Title): 東京 : 芝浦工業大学連携推進部
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM2
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: YH247-1083
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 025163995
http://id.ndl.go.jp/bib/025163995
Bibliographic Record Category (NDL): 632