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雑誌　電子資料砥粒加工学会学術講演会講演論文集
Volume number2013
Article単結晶SiC高能率複...

単結晶SiC高能率複合研磨法の開発

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単結晶SiC高能率複合研磨法の開発

Call No. (NDL)
YH247-1244
Bibliographic ID of National Diet Library
025183455
Material type
記事
Author
栗田 恒雄ほか
Publisher
東京 : 砥粒加工学会
Publication date
2013
Material Format
Recording Media
Journal name
砥粒加工学会学術講演会講演論文集 ABTEC / 砥粒加工学会学術講演会(ABTEC)実行委員会 編 2013
Publication Page
p.367-372
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Recording Media

Material Type
記事
Title
単結晶SiC高能率複合研磨法の開発
Author/Editor
栗田 恒雄
三宅 晃司
河田 研治 他
Author Heading
栗田 恒雄
三宅 晃司
河田 研治
Alternative Title
Development of new combined polishing process for single crystal silicon carbide
Periodical title
砥粒加工学会学術講演会講演論文集 ABTEC / 砥粒加工学会学術講演会(ABTEC)実行委員会 編
No. or year of volume/issue
2013
Pages
367-372
Publication date of volume/issue (W3CDTF)
2013
Publication (Periodical Title)
東京 : 砥粒加工学会