フォトリソグラフィを用いたMOEMS技術の教材開発(第3報)マイクロ光電子デバイスの設計及び基礎特性の評価

Journal name: 東京工業高等専門学校研究報告書 = Research reports of Tokyo National College of Technology / 東京工業高等専門学校図書委員会編 (45)(2):2014.1

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Material Type: 記事
Title: フォトリソグラフィを用いたMOEMS技術の教材開発(第3報)マイクロ光電子デバイスの設計及び基礎特性の評価
Author/Editor: 新國広幸
伊藤浩
Author Heading: 新國広幸
伊藤浩
Alternative Title: Development of Teaching Materials for MOEMS Technology by Using Photolithography(3rd Report)Design and Evaluation of Basic Characteristics for Micro-Opto-Electro Device
Periodical title: 東京工業高等専門学校研究報告書 = Research reports of Tokyo National College of Technology / 東京工業高等専門学校図書委員会編
No. or year of volume/issue: (45)(2):2014.1
Issue: 45
Sequential issue number: 2
Pages: 73-80
Publication date of volume/issue (W3CDTF): 2014-01
ISSN (Periodical Title): 0286-0503
ISSN-L (Periodical Title): 0286-0503
Publication (Periodical Title): 八王子 : 東京工業高等専門学校
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: MOEMS
photolithography
guided-wave optical pressure sensor
NDLC: ZM2
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-467
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 025243610
http://id.ndl.go.jp/bib/025243610
Bibliographic Record Category (NDL): 632