SiCショットキーダイオードの特性と欠陥の関係 (特集 ワイドギャップ半導体・パワー素子の表面科学)
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- Material Type
- 記事
- Author/Editor
- 渡辺 行彦勝野 高志石川 剛 他
- Series Title
- Alternative Title
- Relationship between Characteristics of SiC-SBD and Surface Defect
- Periodical title
- 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編
- No. or year of volume/issue
- 35(2):2014.2
- Volume
- 35
- Issue
- 2