Effects of Etching Surface Roughness on the Fatigue Characteristics of Single-Crystal Silicon
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- Material Type
- 記事
- Author/Editor
- Tsuyoshi IkeharaToshiyuki Tsuchiya
- Author Heading
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 134(2):2014.2
- Volume
- 134
- Issue
- 2
- Pages
- 32-37
- Publication date of volume/issue (W3CDTF)
- 2014-02