Holdings of Libraries in Japan
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 多和田 雅師柳澤 政生戸川 望 他
- Series Title
- Alternative Title
- Exposure source optimization by clustering for lithography
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 113(454):2014.3.3-5
- Volume
- 113
- Issue
- 454