CuMn合金配線の拡張性とメカニズム (特集 LSIの配線技術と表面・界面の科学)
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- Material Type
- 記事
- Title
- Author/Editor
- 野上 毅
- Series Title
- Author Heading
- Alternative Title
- Extendibility of CuMn Alloy-Seed Interconnects and the Fundamentals
- Periodical title
- 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編
- No. or year of volume/issue
- 35(5):2014.5
- Volume
- 35
- Issue
- 5