化学修飾ナノダイヤモンドを用いた銅薄膜表面の化学機械研磨

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Material Type: 記事
Title: 化学修飾ナノダイヤモンドを用いた銅薄膜表面の化学機械研磨
Author/Editor: 高谷裕浩
村井亮太
林照剛他
Author Heading: 高谷裕浩
村井亮太
林照剛
Periodical title: New diamond = ニューダイヤモンド / ニューダイヤモンドフォーラム編
No. or year of volume/issue: 30(2)=113:2014.4
Volume: 30
Issue: 2
Sequential issue number: 113
Pages: 25-27
Publication date of volume/issue (W3CDTF): 2014-04
ISSN (Periodical Title): 1340-4792
ISSN-L (Periodical Title): 1340-4792
Publication (Periodical Title): 東京 : ニューダイヤモンドフォーラム
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP9
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-1378
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 025509805
http://id.ndl.go.jp/bib/025509805
Bibliographic Record Category (NDL): 632