全方位角度分解散乱光計測による加工表面性状解析技術 (特集 光学素子構造を支える計測技術)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 高谷 裕浩林 照剛道畑 正岐
- Series Title
- Alternative Title
- Ultra-finished Surface Areal-topography Analysis Based on Total Angle-resolved Laser Light Scattering
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 80(6)=954:2014.6
- Volume
- 80
- Issue
- 6