Cr薄膜形成におけるSi基板酸化層の反射率への影響

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Cr薄膜形成におけるSi基板酸化層の反射率への影響

Call No. (NDL)
Z14-451
Bibliographic ID of National Diet Library
025602171
Material type
記事
Author
山田 雄一ほか
Publisher
日野 : 明星大学
Publication date
2012
Material Format
Paper
Journal name
明星大学理工学部研究紀要 = Research bulletin of Meisei University. Physical sciences and engineering (48):2012
Publication Page
p.1-3
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Paper

Material Type
記事
Author/Editor
山田 雄一
高橋 雄太郎
合田 一夫
Alternative Title
Effect of Si substrate oxidization on reflectance for Cr thin film
Periodical title
明星大学理工学部研究紀要 = Research bulletin of Meisei University. Physical sciences and engineering
No. or year of volume/issue
(48):2012
Issue
48
Pages
1-3
Publication date of volume/issue (W3CDTF)
2012