Progresses and Challenges of EUV Lithography Materials

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Material Type: 記事
Title: Progresses and Challenges of EUV Lithography Materials
Author/Editor: Danilo De Simone
Anne-Marie Goethals
Frieda Van Roey 他
Author Heading: Danilo De Simone
Anne-Marie Goethals
Frieda Van Roey
Periodical title: Journal of photopolymer science and technology
No. or year of volume/issue: 27(5):2014
Volume: 27
Issue: 5
Pages: 601-610
Publication date of volume/issue (W3CDTF): 2014
ISSN (Periodical Title): 0914-9244
ISSN-L (Periodical Title): 0914-9244
Publication (Periodical Title): Chiba : The Society of Photopolymer Science and Technology
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: EUV lithography
EUVL
EUV resists
Alternative EUV materials
NDLC: ZP48
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z53-W515
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 025604173
http://id.ndl.go.jp/bib/025604173
Bibliographic Record Category (NDL): 632