Scanning Removal of Ion-implanted Novolak Resist by using a Laser Irradiation

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Material Type: 記事
Title: Scanning Removal of Ion-implanted Novolak Resist by using a Laser Irradiation
Author/Editor: Tomosumi Kamimura
Yuta Kuroki
Takuya Kiriyama 他
Author Heading: Tomosumi Kamimura
Yuta Kuroki
Takuya Kiriyama
Periodical title: Journal of photopolymer science and technology
No. or year of volume/issue: 27(2):2014
Volume: 27
Issue: 2
Pages: 237-241
Publication date of volume/issue (W3CDTF): 2014
ISSN (Periodical Title): 0914-9244
ISSN-L (Periodical Title): 0914-9244
Publication (Periodical Title): Chiba : The Society of Photopolymer Science and Technology
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: resist stripping
ion-implanted novolak resist
laser irradiation
laser-induced damage
scanning removal
NDLC: ZP48
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z53-W515
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 025604251
http://id.ndl.go.jp/bib/025604251
Bibliographic Record Category (NDL): 632