Optical Observation of Deep Bulk Damage in Amorphous Perfluorocarbon Films Produced by UV Photons Emitted from Low-Pressure Argon Plasma
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- Material Type
- 記事
- Author/Editor
- Takao OnoRyo IizukaTakanori Akagi 他
- Author Heading
- Periodical title
- Journal of photopolymer science and technology
- No. or year of volume/issue
- 27(3):2014
- Volume
- 27
- Issue
- 3
- Pages
- 393-398
- Publication date of volume/issue (W3CDTF)
- 2014