Moving-mask Lithography for 3D Microstructure Molding

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Material Type: 記事
Title: Moving-mask Lithography for 3D Microstructure Molding
Author/Editor: Nobuhiro Kato
Takahisa Kai
Masakazu Hirano
Author Heading: Nobuhiro Kato
Takahisa Kai
Masakazu Hirano
Periodical title: Journal of photopolymer science and technology
No. or year of volume/issue: 27(1):2014
Volume: 27
Issue: 1
Pages: 85-89
Publication date of volume/issue (W3CDTF): 2014
ISSN (Periodical Title): 0914-9244
ISSN-L (Periodical Title): 0914-9244
Publication (Periodical Title): Chiba : The Society of Photopolymer Science and Technology
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: moving mask exposure
backside exposure
molding
NDLC: ZP48
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z53-W515
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 025604398
http://id.ndl.go.jp/bib/025604398
Bibliographic Record Category (NDL): 632