ミニマルファブのための1インチサイズHiPIMSプラズマ源(小特集プラズマ応用技術の新展開)

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Material Type: 記事
Title: ミニマルファブのための1インチサイズHiPIMSプラズマ源
Author/Editor: 行村建
小木曽久人
中野禅
Series Title: 小特集プラズマ応用技術の新展開
Author Heading: 行村建
小木曽久人
中野禅
Alternative Title: 1 Inch-sized HiPIMS Glow Plasma Source for “Minimal Fab Manufacturing System”
Periodical title: 日本機械学会誌
No. or year of volume/issue: 117(1148):2014.7
Volume: 117
Issue: 1148
Pages: 467-469
Publication date of volume/issue (W3CDTF): 2014-07
ISSN (Periodical Title): 0021-4728
ISSN-L (Periodical Title): 0021-4728
Publication (Periodical Title): 東京 : 日本機械学会 ; 1938-
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN11
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-110
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 025609303
http://id.ndl.go.jp/bib/025609303
Bibliographic Record Category (NDL): 632