Volume number2014.春季
MEMS技術を用いた...

MEMS技術を用いた電極分割形フレキシブルERマイクロバルブの開発

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MEMS技術を用いた電極分割形フレキシブルERマイクロバルブの開発

Call No. (NDL)
Z74-B855
Bibliographic ID of National Diet Library
025610716
Material type
記事
Author
吉田 和弘ほか
Publisher
東京 : 日本フルードパワーシステム学会
Publication date
2014
Material Format
Paper
Journal name
フルードパワーシステム講演会講演論文集 = The proceedings Conference of Japan Fluid Power System Society 2014.春季
Publication Page
p.82-84
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Paper

Material Type
記事
Author/Editor
吉田 和弘
塚本 昇
金 俊完 他
Alternative Title
Development of a Divided Electrode Type Flexible ER Microvalve Using MEMS Technologies
Periodical title
フルードパワーシステム講演会講演論文集 = The proceedings Conference of Japan Fluid Power System Society
No. or year of volume/issue
2014.春季
Pages
82-84
Publication date of volume/issue (W3CDTF)
2014
Publication (Periodical Title)
東京 : 日本フルードパワーシステム学会